Russia's Ministry of Industry and Trade has allocated 497.1 million rubles for the development of metrology equipment needed for photolithography to support the production of domestically produced chips, cnews.ru reported on November 7th. The ministry issued a tender in November 2024 for the relevant research and development. The project is aimed at establishing a reference set of laser radiation parameters in the ultraviolet region of the spectrum, covering 193- and 248-nm wavelength equipment, and is expected to be completed by April 2027 The developed components and materials need to be produced domestically to reduce dependence on foreign countries.
The head of the electronics department said that the ordered equipment will be used to check the technical parameters of lasers in lithography devices. Meanwhile, Russia plans to start production of 350-nanometer topological chip devices in 2024 and 130-nanometer devices in 2026, with testing of the relevant lithography machines already underway.
